发明名称 SEMICONDUCTOR STRUCTURE PROFILE
摘要 One or more embodiments of techniques or systems for forming a semiconductor structure are provided herein. In some embodiments, a semiconductor structure includes a substrate, a first lightly doped drain (LDD), a second LDD, an interface layer (IL), a high-k stack, a gate region, a dummy poly region, a first hard mask (HM) region, a second HM region, and a seal spacer region. The HK stack has a HK stack width and the gate region has a gate region width that is less than or substantially equal to the HK stack width. Because of the increased width of the HK stack, some of the HK stack likely overlaps some of the first LDD or the second LDD. In this manner, a saturation current and a threshold voltage associated with the semiconductor structure are improved. The increased width of the HK stack also protects more of the IL during LDD implanting.
申请公布号 US2014264589(A1) 申请公布日期 2014.09.18
申请号 US201313799227 申请日期 2013.03.13
申请人 Manufacturing Company Limited Taiwan Semiconductor 发明人 Chang Che-Cheng;Lin Jr-Jung;Chen Yi - Jen;Chang Yung Jung
分类号 H01L29/78;H01L29/66 主分类号 H01L29/78
代理机构 代理人
主权项 1. A semiconductor structure, comprising: a substrate comprising a first lightly doped drain (LDD) and a second LDD; an interface layer (IL) on the substrate; a high-k (HK) stack on the IL, the HK stack having a HK stack width; and a gate region on the HK stack, the gate region having a gate region width less than the HK stack width.
地址 US