Lift Pin for Substrate Processing

摘要

Lift pins and devices having lift pins are provided. According to an aspect, a lift pin may have a tapered distal portion. According to another aspect, a lift pin may have two portions threadedly engaged with each other. According to yet another aspect, a lift pin may be mounted to a lifting plate with slackness.

主权项

1. An apparatus, comprising:
a lift pin, the lift pin comprising: a distal end, a proximal end, a tapered portion at the distal end, a diameter of the tapered portion decreasing from the distal end towards the proximal end, wherein a tapering angle of the tapered portion is less than 20°.