ULTRASOUND-ASSISTED WATER-CONFINED LASER MICROMACHINING

摘要

Systems and processes for improved laser machining, such as micro machining, of a workpiece. Systems and processes involve directing at a first surface of the workpiece a laser beam and wherein at least the laser-irradiated region of the first surface of the workpiece is immersed in a liquid, and delivering to the liquid-immersed and laser-irradiated workpiece surface region at least a first ultrasound output from a first ultrasound device. The ultrasound output and the laser beam desirably impact the workpiece first surface substantially simultaneously.

主权项

1. A system for machining a workpiece, the system comprising:
a laser source effective upon actuation to direct a laser beam to irradiate a region of a first surface of the workpiece; a liquid immersion element effective to immerse at least the laser-irradiated region of the first surface of the workpiece in liquid while a laser beam from the laser source is directed thereat; and a first ultrasound output device effective to deliver at least a first ultrasound output to the liquid-immersed and laser-irradiated workpiece surface region.