发明名称 |
NANOWIRE-BASED MECHANICAL SWITCHING DEVICE |
摘要 |
Nanowire-based mechanical switching devices are described. For example, a nanowire relay includes a nanowire disposed in a void disposed above a substrate. The nanowire has an anchored portion and a suspended portion. A first gate electrode is disposed adjacent the void, and is spaced apart from the nanowire. A first conductive region is disposed adjacent the first gate electrode and adjacent the void, and is spaced apart from the nanowire. |
申请公布号 |
US2014262707(A1) |
申请公布日期 |
2014.09.18 |
申请号 |
US201313996507 |
申请日期 |
2013.03.14 |
申请人 |
Pawashe Chytra;Lin Kevin;Chaudhry Anurag;Kim Raseong;Kim Seiyon;Kuhn Kelin;Manipatruni Sasikanth;Rios Rafael;Young Ian A. |
发明人 |
Pawashe Chytra;Lin Kevin;Chaudhry Anurag;Kim Raseong;Kim Seiyon;Kuhn Kelin;Manipatruni Sasikanth;Rios Rafael;Young Ian A. |
分类号 |
H01H59/00 |
主分类号 |
H01H59/00 |
代理机构 |
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代理人 |
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主权项 |
1. A nanowire relay, comprising:
a nanowire disposed in a void disposed above a substrate, the nanowire having an anchored portion and a suspended portion; a first gate electrode disposed adjacent the void, and spaced apart from the nanowire; and a first conductive region disposed adjacent the first gate electrode and adjacent the void, and spaced apart from the nanowire. |
地址 |
Beaverton OR US |