Anti-Reflective Coatings with Porosity Gradient and Methods for Forming the Same

摘要

Embodiments provided herein provide anti-reflective coatings with porosity gradients and methods for forming such anti-reflective coatings. A transparent substrate is provided. A primary material and a sacrificial material are simultaneously deposited above the transparent substrate to form a coating above the transparent substrate. At least some of the sacrificial material is removed from the coating to form a plurality of pores in the coating.

主权项

1. A method for forming an anti-reflective coating comprising:
providing a transparent substrate; simultaneously depositing a primary material and a sacrificial material onto the transparent substrate to form a coating above the transparent substrate; and removing the sacrificial material from the coating to form a plurality of pores in the coating.