ROTARY FLEX UNION

摘要

A rotary union is disclosed for use in semiconductor processing applications. The rotary is coupled between a platen base and a platen of a rotating platen assembly. The rotary union includes a coiled flexible tube member for passing a flow of cryogenic fluid to the platen for cooling during an ion implant procedure. The coiled flexible tube member has a first configuration associated with a non-rotated position of the platen and a second configuration associated with a rotated position of the platen. In the first configuration the coiled flexible tube member has a first bend radius, and in the second configuration the coiled flexible tube member has a second bend radius that is smaller than first bend radius. The rotary union also includes a base with a peripheral wall that restricts movement of the coiled flexible tube member as it cycles between the first and second configurations.

主权项

1. A rotary platen apparatus, comprising:
a platen base; a platen rotatably coupled to the platen base; and a rotary union for supplying cryogenic fluid to cool the platen, the rotary union coupled between the platen base and the platen, the rotary union comprising a coiled flexible tube member, the coiled flexible tube member having a first configuration associated with a non-rotated position of the platen and a second configuration associated with a rotated position of the platen; wherein in the first configuration the coiled flexible tube member has a first bend radius, and in the second configuration the coiled flexible tube member has a second bend radius, the first and second bend radii being different.