Integrated Electrical-Switching Mechanical Device Having a Blocked State

摘要

An integrated circuit, comprising an electrical-switching mechanical device in a housing having at least one first thermally deformable assembly including a beam held in at least two different locations by at least two arms secured to edges of the housing, the beam and the arms being metallic and situated within the same first metallization level and an electrically conductive body, wherein the said first thermally deformable assembly has at least one first configuration at a first temperature and a second configuration when at least one is at a second temperature different from the first temperature, wherein the beam is at a distance from the body in the first configuration and in contact with the said body and immobilized by the said body in the second configuration and establishing or prohibiting an electrical link passing through the body and through the beam.

主权项

1. An integrated circuit, comprising:
a first metallization level separated from a second metallization level by an insulating region and disposed on a substrate; and an electrical-switching mechanical device in a housing comprising:
at least one first thermally deformable assembly including a beam held in at least two different locations by at least two arms secured to edges of the housing, the beam and the arms being metallic and situated within a same first metallization level; andan electrically conductive body; wherein the said first thermally deformable assembly has at least one first configuration at a first temperature and a second configuration when at least one is at a second temperature different from the first temperature; wherein the beam is at a distance from the said body in the first configuration and in contact with the said body and immobilized by the said body in the second configuration and establishing or prohibiting an electrical link passing through the said body and through the said beam; and wherein the said first thermally deformable assembly is configured to be activated and switch from one of the configurations to another.