| 发明名称 |
CHEMICAL SENSOR WITH SIDEWALL SPACER SENSOR SURFACE |
| 摘要 |
In one implementation, a chemical sensor is described. The chemical sensor includes chemically-sensitive field effect transistor including a floating gate conductor having an upper surface. A dielectric material defines an opening extending to the upper surface of the floating gate conductor. A conductive sidewall spacer is on a sidewall of the opening and contacts the upper surface of the floating gate conductor. |
| 申请公布号 |
US2014264464(A1) |
申请公布日期 |
2014.09.18 |
| 申请号 |
US201313801002 |
申请日期 |
2013.03.13 |
| 申请人 |
LIFE TECHNOLOGIES CORPORATION |
发明人 |
FIFE Keith G.;BUSTILLO James;OWENS Jordan |
| 分类号 |
G01N27/414 |
主分类号 |
G01N27/414 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A chemical sensor comprising:
a chemically-sensitive field effect transistor including a floating gate conductor having an upper surface; a dielectric material defining an opening extending to the upper surface of the floating gate conductor; and a conductive sidewall spacer on a sidewall of the opening and contacting the upper surface of the floating gate conductor. |
| 地址 |
Carlsbad CA US |
