Microelectrochemical Sensor and Method for Operating a Microelectrochemical Sensor

摘要

A microelectrochemical sensor includes a carrier material composed of a semiconductor substrate, and includes a chemosensitive sensor element. The chemosensitive sensor element is positioned in a first partial region of the carrier material. A heating element is positioned in a region of the chemosensitive sensor element and is configured to regulate a temperature of the chemosensitive sensor element. A microelectronic unit is positioned in a second partial region of the carrier material, and is connected to the chemosensitive sensor element and the heating element via conductor tracks integrated into the carrier material. The microelectronic unit is configured to operate the heating element and the sensor element.

主权项

1. A microelectrochemical sensor comprising:
a carrier material that includes:
a semiconductor substrate; ora material defined by a semiconductor-process structure; a chemosensitive sensor element positioned in a first partial region of the carrier material; a heating element positioned in a region of the chemosensitive sensor element, and configured to regulate a temperate of the chemosensitive sensor element; and a microelectric unit positioned in a second partial region of the carrier material, wherein the microelectric unit:
is connected to the chemosensitive sensor element and the heating element via conductor tracks integrated into the carrier material; andis configured to operate the heating element and the chemosensitive sensor element.