发明名称 VIBRATION ELEMENT, VIBRATOR, OSCILLATOR, ELECTRIC APPARATUS AND MOVABLE BODY
摘要 PROBLEM TO BE SOLVED: To provide a vibration element, a vibrator, an oscillator, an electronic apparatus and a movable body, capable of reducing a change in vibration property due to external force such as vibration to exhibit a stable vibration property while reducing an increase in size.SOLUTION: A vibration element 1 includes: a vibration part 21 having a vibration region 219, a thick part 22 provided along a portion of a contour of the vibration part 21, having a thickness greater than that of the vibration part 21, and integrated with the vibration part 21; and a beam part 23 extending along a portion opened from the thick part 22 of the contour of the vibration part 21, having a thickness less than that of the thick part 22, and integrated with the vibration part 21.
申请公布号 JP2014171149(A) 申请公布日期 2014.09.18
申请号 JP20130042584 申请日期 2013.03.05
申请人 SEIKO EPSON CORP 发明人 KIKUSHIMA MASAYUKI;TANAKA MASAKO;OBATA NAOHISA;UNNO YUKIHIRO
分类号 H03H9/19;H01L41/09;H01L41/18;H03B5/32;H03H9/02 主分类号 H03H9/19
代理机构 代理人
主权项
地址