发明名称 METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND DEVELOPMENT SUPPORT SYSTEM
摘要 PROBLEM TO BE SOLVED: To provide a method of manufacturing a semiconductor device capable of increasing a withstanding voltage without enlarging a size of a semiconductor element, and to provide a development support system supporting a process of deciding a specific resistance value to be set to a semiconductor layer where the semiconductor element is formed, in this manufacturing method.SOLUTION: A method of manufacturing semiconductor device includes steps of: preparing a first substrate (5, 4) configured to have a supporting substrate (1), and a first semiconductor layer (6) formed on the supporting substrate (1) and to which a predetermined first specific resistance value is set; and forming a semiconductor element (10) on the first semiconductor layer (6). The first specific resistance value is set to such a value that is lower than the specific resistance value corresponding to the maximum value of the withstanding voltage of the semiconductor layer and that the withstanding voltage of the semiconductor layer satisfies a desired withstanding voltage condition, by using a plurality information provided depending on a change in the specific resistance value and related to the withstanding voltage of the semiconductor layer decided by the specific resistance value at a predetermined film thickness of a certain semiconductor layer.
申请公布号 JP2014170821(A) 申请公布日期 2014.09.18
申请号 JP20130041420 申请日期 2013.03.04
申请人 LAPIS SEMICONDUCTOR CO LTD 发明人 KANENO YUSUKE
分类号 H01L29/786;H01L21/336;H01L21/8234;H01L27/06 主分类号 H01L29/786
代理机构 代理人
主权项
地址