发明名称 |
NEURAL SENSING DEVICE AND METHOD FOR MAKING THE SAME |
摘要 |
The present invention provides a neural sensing device and method for making the same. The neural sensing device includes a base, an integrated circuit portion and a plurality of microprobes. The base has an active surface and a backside surface. The integrated circuit portion is disposed on the active surface of the base. The microprobes protrude from the backside surface of the base. The conductive vias are disposed in the microprobes and electrically connected to the integrated circuit portion. |
申请公布号 |
US2014275911(A1) |
申请公布日期 |
2014.09.18 |
申请号 |
US201313802355 |
申请日期 |
2013.03.13 |
申请人 |
ADVANCED SEMICONDUCTOR ENGINEERING, INC. |
发明人 |
Chen Kuo-Hua |
分类号 |
A61B5/04;H01L21/768 |
主分类号 |
A61B5/04 |
代理机构 |
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代理人 |
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主权项 |
1. A neural sensing device, comprising:
a base having an active surface and a backside surface; an integrated circuit portion disposed on the active surface of the base; and a plurality of microprobes protruding from the backside surface of the base, each of the microprobes having a conductive via disposed therein and electrically connected to the integrated circuit portion. |
地址 |
Kaohsiung TW |