Systems and Methods for a Narrow Band High Transmittance Interference Filter

摘要

The present disclosure provides an interference filter, a lithography system incorporating an interference filter, and a method of fabricating an interference filter. The interference filter includes a transparent substrate having a front surface and a back surface, a plurality of alternating material layers formed over the front surface of the transparent substrate that form a bandpass filter, and an anti-reflective structure formed over the back surface of the transparent substrate. The alternating material layers alternate between a relatively high refractive index material and a relatively low refractive index material.

主权项

1. An interference filter comprising:
a transparent substrate having a front surface and a back surface; a plurality of alternating material layers formed over the front surface of the transparent substrate, wherein a sequence of the material layers alternates between relatively high and relatively low refractive indices; and an anti-reflective structure formed over the back surface of the transparent substrate.