WAFER TEMPERATURE MEASUREMENT TOOL

摘要

A wafer temperature measurement tool for measuring the surface temperature of a semiconductor wafer. The tool can be used to measure temperature on different parts of the wafer to provide a high resolution temperature distribution map. The tool includes an internal calibrated weight that is slidably disposed within a tool body. A temperature sensor is attached to the bottom of the weight. Ceramic stands are attached to the bottom of the tool body. Gravity pulls down on the weight such that the temperature sensor contacts the wafer when the ceramic stands of the tool body are placed on the wafer.

主权项

1. A wafer temperature measurement tool, comprising:
a tool body; a calibrated weight slidably disposed within the tool body; a foot attached to a bottom end of the calibrated weight and protruding from a bottom end of the tool body; and a temperature sensor extending from a bottom surface of the foot.