SUBSTRATE SUPPORT PLATE WITH IMPROVED LIFT PIN SEALING

摘要

Embodiments of lift pin assemblies and substrate supports having such lift pin assemblies are provided herein. In some embodiments, a lift pin assembly includes a body with a first end including a flange and an opposing second end; a bore through the body from the first end to the second end; a profile on an outer surface proximate a second end; and a collar, wherein the profile is configured to removably lock the collar onto the second end.

主权项

1. A lift pin assembly, comprising:
a body with a first end including a flange; a bore through the body; a profile on an outer surface proximate a second end; and a collar, wherein the profile is configured to removably lock the collar onto the second end.