ORGANIC LIGHT EMITTING DIODE DISPLAY AND MANUFACTURING METHOD THEREOF

摘要

A method of manufacturing an organic light emitting diode (OLED) display includes forming a thin film transistor on a substrate; forming a first electrode electrically connected with the thin film transistor; forming a hole auxiliary layer on the first electrode; depositing an organic material on the hole auxiliary layer using a mask having an opening corresponding to the first electrode; forming an organic emission layer by partially eliminating the organic material through dry-etching, the dry-etching being performed to eliminate the organic material deposited outside of a boundary of the first electrode; forming an electron auxiliary layer on the organic emission layer; and forming a second electrode on the electron auxiliary layer.

主权项

1. A method of manufacturing an organic light emitting diode (OLED) display, the method comprising:
forming a thin film transistor on a substrate; forming a first electrode electrically connected with the thin film transistor; forming a hole auxiliary layer on the first electrode; depositing an organic material on the hole auxiliary layer using a mask having an opening corresponding to the first electrode; forming an organic emission layer by partially eliminating the organic material through dry-etching, the dry-etching being performed to eliminate the organic material deposited outside of a boundary of the first electrode; forming an electron auxiliary layer on the organic emission layer; and forming a second electrode on the electron auxiliary layer.