BIS(ALKYLIMIDO)-BIS(ALKYLAMIDO)MOLYBDENUM MOLECULES FOR DEPOSITION OF MOLYBDENUM-CONTAINING FILMS
摘要
Bis(alkylimido)-bis(alkylamido)molybdenum compounds, their synthesis, and their use for the deposition of molybdenum-containing films are disclosed.
申请公布号
WO2014140863(A2)
申请公布日期
2014.09.18
申请号
WO2014IB01034
申请日期
2014.03.12
申请人
L'AIR LIQUIDE, SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GEORGES CLAUDE;GATINEAU, JULIEN;KO, CHANGHEE;YOKOTA, JIRO;LANSALOT-MATRAS, CLÉMENT
