BIS(ALKYLIMIDO)-BIS(ALKYLAMIDO)TUNGSTEN MOLECULES FOR DEPOSITION OF TUNGSTEN-CONTAINING FILMS
摘要
<p>Bis(alkylimido)-bis(alkylamido)tungsten compounds, their synthesis, and their use for the deposition of tungsten-containing films are disclosed.</p>
申请公布号
WO2014140668(A1)
申请公布日期
2014.09.18
申请号
WO2013IB00930
申请日期
2013.03.15
申请人
L'AIR LIQUIDE, SOCIETE ANONYME POUR I'ETUDE ET I'EXPLOITATION DES PROCEDES GEORGES CLAUDE;GATINEAU, JULIEN;KO, CHANGHEE;YOKOTA, JIRO;LANSALOT-MATRAS, CLEMENT
