OPTICAL SENSOR

摘要

An optical sensor 1000 including a MicroElectroMechanicalSystems (MEMS) structure 1005, and a grating coupled resonating structure 1010 5 positioned adjacent to the MEMS structure 1005, the grating coupled resonating structure 1010 comprising an interrogating grating coupler 1020 wherein the interrogating grating coupler 1020 and the MEMS structure 1005 form an optical resonant cavity.