| 摘要 |
PROBLEM TO BE SOLVED: To provide a liquid feeder in which when discharge of a processed liquid from a nozzle is stopped in supplying the processed liquid in a liquid supply source from the nozzle to a treated body, liquid dripping from the nozzle can be prevented.SOLUTION: In a liquid feeder, a first liquid supply passage 3A and a second liquid supply passage 3B between a liquid supply source and a nozzle 24 are connected to a liquid pressure adjustment chamber 8 provided with a liquid pressure adjustment valve 31B in such a manner that both the passages are orthogonal to each other. A diaphragm 6 of the liquid pressure adjustment valve 31 is so disposed as to face an upstream end of the second liquid supply passage 3B, and further, the diaphragm 6 is able to advance and retract in an extending direction of the second liquid supply passage 3B. After discharge of a treatment liquid is completed, a liquid pressure in the liquid supply passages is lowered once, and thereafter, when increase of the liquid pressure is started, the diaphragm 6 of the liquid pressure adjustment valve 31B is retracted. |
