PRODUCTION PROCESSING SYSTEM, CONTROL DEVICE FOR PRODUCTION PROCESSING, METHOD FOR CONTROLLING PRODUCTION PROCESSING AND STORAGE MEDIUM

摘要

A production processing system includes a plurality of processing tools configured to process workpieces, an equipment which can be shared by the plurality of processing tools, a transfer device configured to transfer the workpieces to the plurality of processing tools, a host computer configured to create a transfer plan including information on timings for the workpieces to be carried in and carried out of the plurality of processing tools by the transfer device, a group controller configured to generate a use plan for the equipment based on acquired information, and a shared controller configured to control processing timings of the equipment and each of the plurality of processing tools based on the use plan, an operational state of the equipment, and use information including at least one of use reservation, inquiry, execution, and release information for the equipment by each of the plurality of processing tools.

主权项

1. A production processing system comprising:
a plurality of processing tools configured to process workpieces; an equipment configured to be shared by the plurality of processing tools; a transfer device configured to transfer the workpieces to the plurality of processing tools; a host computer configured to acquire an operational state and an operational schedule including information regarding a timing for maintenance from the plurality of processing tools and configured to create a transfer plan including information on timings for the workpieces to be carried in and carried out of the plurality of processing tools by the transfer device; a group controller configured to acquire the operational state, the operational schedule and the transfer plan from the host computer and configured to generate a use plan for the equipment based on at least one of the acquired operational state, operation schedule and transfer plan; and a shared controller configured to control processing timings of the equipment and each of the plurality of processing tools based on the use plan, the operational state of the equipment, and use information including at least one of use reservation, inquiry, execution, and release information for the equipment by each of the plurality of processing tools.