| 发明名称 |
CHARGED PARTICLE BEAM WRITING APPARATUS, APERTURE UNIT, AND CHARGED PARTICLE BEAM WRITING METHOD |
| 摘要 |
A charged particle beam writing apparatus according to an embodiment includes: a beam emitter configured to emit a charged particle beam; an aperture having an opening portion through which the charged particle beam emitted by the beam emitter passes; an aperture beam tube being provided on a surface of the aperture and functioning as a thermally conductive member having thermal conductivity; and a heater provided on a surface of the aperture beam tube and configured to supply heat to the aperture via the aperture beam tube. |
| 申请公布号 |
US2014273536(A1) |
申请公布日期 |
2014.09.18 |
| 申请号 |
US201414193182 |
申请日期 |
2014.02.28 |
| 申请人 |
NuFlare Technology, Inc. |
发明人 |
NISHIYAMA Tetsuro |
| 分类号 |
H01J37/317;H01L21/263 |
主分类号 |
H01J37/317 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A charged particle beam writing apparatus comprising:
a beam emitter configured to emit a charged particle beam; an aperture having an opening portion through which the charged particle beam emitted by the beam emitter passes; a thermally conductive member provided on a surface of the aperture and having thermal conductivity; and a heater provided on a surface of the thermally conductive member and configured to supply heat to the aperture via the thermally conductive member. |
| 地址 |
Yokohama JP |
