发明名称 SEALANT LAMINATED COMPOSITE, SEALED SEMICONDUCTOR DEVICES MOUNTING SUBSTRATE, SEALED SEMICONDUCTOR DEVICES FORMING WAFER, SEMICONDUCTOR APPARATUS, AND METHOD FOR MANUFACTURING SEMICONDUCTOR APPARATUS
摘要 Disclosed is a sealant laminated composite for collectively sealing a semiconductor devices mounting surface of a substrate on which semiconductor devices may be mounted or a semiconductor devices forming surface of a wafer on which semiconductor devices may be formed, including a support wafer that may be composed of silicon and an uncured resin layer that may be constituted of an uncured thermosetting resin formed on one side of the support wafer.
申请公布号 US2014264956(A1) 申请公布日期 2014.09.18
申请号 US201414287949 申请日期 2014.05.27
申请人 SHIN-ETSU CHEMICAL CO., LTD. 发明人 SHIOBARA Toshio;AKIBA Hideki;SEKIGUCHI Susumu
分类号 H01L21/56;H01L21/78;H01L23/31 主分类号 H01L21/56
代理机构 代理人
主权项 1. A sealant laminated composite for collectively sealing a semiconductor devices mounting surface of a substrate on which semiconductor devices are mounted or a semiconductor devices forming surface of a wafer on which semiconductor devices are formed, comprising: a support wafer composed of silicon; and an uncured resin layer constituted of an uncured thermosetting resin formed on one side of the support wafer.
地址 Tokyo JP