Interconnect Structure for Stacked Device

摘要

A stacked integrated circuit (IC) device and a method are disclosed. The stacked IC device includes a first semiconductor element. The first substrate includes a dielectric block in the first substrate; and a plurality of first conductive features formed in first inter-metal dielectric layers over the first substrate. The stacked IC device also includes a second semiconductor element bonded on the first semiconductor element. The second semiconductor element includes a second substrate and a plurality of second conductive features formed in second inter-metal dielectric layers over the second substrate. The stacked IC device also includes a conductive deep-interconnection-plug coupled between the first conductive features and the second conductive features. The conductive deep-interconnection-plug is isolated by dielectric block, the first inter-metal-dielectric layers and the second inter-metal-dielectric layers.

主权项

1. A device comprising:
a first semiconductor element comprising:
a first substrate;a dielectric block in the first substrate; anda plurality of first conductive features formed in first inter-metal dielectric layers over the first substrate. a second semiconductor element bonded to the first semiconductor element, wherein the second semiconductor element comprises:
a second substrate; anda plurality of second conductive features formed in second inter-metal dielectric layers over the second substrate. a conductive deep-interconnection-plug coupled between the first conductive features and the second conductive features and isolated by dielectric block, the first inter-metal-dielectric layers and the second inter-metal-dielectric layers, the conductive deep-interconnection-plug comprises:
an upper portion formed in the dielectric block and the first inter-metal-dielectric layers, wherein the upper portion is of a first width; anda lower portion formed in the first and second inter-metal-dielectric layers, wherein the lower portion is of a second width less than the first width.