发明名称 OPTICAL SENSORS FOR DETECTING RELATIVE MOTION AND/OR POSITION AND METHODS AND SYSTEMS FOR USING SUCH OPTICAL SENSORS
摘要 An optical sensor, according to an embodiment of the present invention, includes a photodetector region and a plurality of slats over the photodetector region. In an embodiment, the slats are made up of a plurality of metal layers connected in a stacked configuration with a plurality of metal columns. The metal columns can be made of metal vias, metal contacts and/or metal plugs. In an embodiment, the slats are angled relative to a surface of the photodetector region, wherein the angling of the slats is achieved by the metal layers being laterally offset relative to one another and/or metal columns being laterally offset relative to one another. In an alternative embodiment, the slats are made of an opaque polymer material, such as an opaque photoresist.
申请公布号 US2014264689(A1) 申请公布日期 2014.09.18
申请号 US201314102245 申请日期 2013.12.10
申请人 Intersil Americas LLC 发明人 Hebert Francois
分类号 H01L31/0232 主分类号 H01L31/0232
代理机构 代理人
主权项 1. An optical sensor, comprising: a photodetector region; and a plurality of slats over the photodetector region; wherein the slats are made up of a plurality of metal layers connected in a stacked configuration with a plurality of metal columns.
地址 Milpitas CA US