| 发明名称 |
WAFER HANDLING APPARATUS |
| 摘要 |
Disclosed is a wafer support and alignment apparatus. The wafer support and alignment apparatus includes a wafer support component adapted to seat, align and support a wafer. The wafer support component includes at least one flat portion to support the wafer, at least one alignment lip portion protruding upward from the at least one flat portion, and at least one recessed pocket carved out of a portion of the at least one base portion. The at least one recessed pocket is adapted to receive at least one pad. |
| 申请公布号 |
US2014265392(A1) |
申请公布日期 |
2014.09.18 |
| 申请号 |
US201313800768 |
申请日期 |
2013.03.13 |
| 申请人 |
VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC. |
发明人 |
Pergande Paul E.;Carlson Charles T. |
| 分类号 |
B25J15/00 |
主分类号 |
B25J15/00 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A wafer support and alignment apparatus comprising:
a wafer support component adapted to seat, align and support a wafer, the wafer support component including:
at least one flat portion to support the wafer;at least one alignment lip portion protruding upward from the at least one flat portion; andat least one recessed pocket carved out of a portion of the at least one flat portion, the at least one recessed pocket adapted to receive at least one pad; and a base adapted to receive the wafer support component, the base further adapted to attach to an end effector apparatus. |
| 地址 |
Gloucester MA US |
