LAYOUT BOUNDARY METHOD

摘要

Some embodiments of the present disclosure relates to a method and apparatus to achieve a layout that is compatible with a multiple-patterning process. Two or more unit cells are constructed with layouts which satisfy the properties of the multiple-patterning process, and are each decomposed into two or more colors to support the multiple-patterning process. An active layout feature is merged with a dummy wire at a shared boundary between two unit cells. In the event of a short between two active layout features at the shared boundary, an automatic post-layout method can rearrange the layout features in a vicinity of the shared boundary to separate the active layout features to achieve cell functionality while satisfying the multiple-patterning properties.

主权项

1. A method to form a cell array on a substrate, comprising:
decomposing a cell design into a first layout pattern and a second layout pattern; creating a border around the cell design within the first layout pattern for cell abutment; sharing the border between the cell and an adjacent cell; separating the border into active border shapes and passive border shapes by removing portions of the first layout pattern; and merging a first active shape of the first layout pattern with a passive border shape to reduce area of the cell design.