| 主权项 |
1. A method for using different variables based on a state associated with a plasma system, comprising:
determining whether the state associated with the plasma system is a first state or a second state; determining a first variable upon determining that the state is the first state, the first variable determined based on a measurement at a communication medium, the communication medium located between a radio frequency (RF) generator and a plasma chamber of the plasma system; determining a second variable upon determining that the state is the second state, the second variable determined based on a measurement at the communication medium; determining whether the second variable exceeds a first threshold; providing an instruction to reduce power supplied to the plasma chamber upon determining that the second variable exceeds the first threshold; and providing an instruction to increase power supplied to the plasma chamber upon determining that the second variable is below the first threshold, wherein the method is executed by one or more processors. |
