MANUFACTURING APPARATUS FOR DEPOSITING A MATERIAL AND A GASKET FOR USE THEREIN

摘要

A gasket seals a chamber of a manufacturing apparatus, which is used to deposit a material on a carrier body. The manufacturing apparatus including a housing defining a chamber. An electrode is disposed through the housing. The housing defines an inlet for introducing a deposition composition, which comprises the material or a precursor thereof, into the chamber. The gasket comprises a body portion defining an upper groove for positioning adjacent the electrode. The body portion of the gasket also defines a lower groove opposite the upper groove for positioning adjacent the housing. A first sealing element is disposed within the upper groove for sealing against the electrode. A second sealing element is disposed within the lower groove for sealing against the housing. Sealing between the electrode and the housing prevents the deposition composition from escaping the chamber.