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发明名称
Aufbringen von Photolack
摘要
Vorrichtungen und Verfahren werden bereitgestellt, in denen ein Photolack auf ein Substrat aufgebracht wird und mindestens einige Bereiche des Photolacks getrocknet werden, bevor ein Substrat von einem Substratträger entfernt wird.
申请公布号
DE102014103557(A1)
申请公布日期
2014.09.18
申请号
DE201410103557
申请日期
2014.03.14
申请人
INFINEON TECHNOLOGIES AG
发明人
BEHRENDT, ANDREAS;WALTER, THOMAS
分类号
G03F7/26;H01L21/027
主分类号
G03F7/26
代理机构
代理人
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