AUTOMATIC REGION-OF-INTEREST EXTRACTING METHOD AND AUTOMATIC OPTICAL INSPECTION APPARATUS

摘要

According to the present invention, there is provided a method of automatically extracting an interest region, which includes a sample photographing step (S210) of photographing a wafer sample (10) placed on a sample stage (20) through a sample photographing unit (110) disposed at an upper portion of the sample stage (20); an outline extracting step (S220) of measuring a pixel value included in information about the photographed image through a control module (120) signal-connected to the sample photographing unit (110), calculating a threshold value, which serves as a determination reference of outline information (E), based on information about the measured pixel value, and extracting the outline information (E) of the sample (10) by comparing the calculated threshold value with each pixel value; an outline removal pattern forming step (S230) of forming an outline removal pattern (P) of the sample (10) with respect to an outer portion of the outline information (E) extracted from the image information; and an interest region extracting step (S240) of extracting an interest region of the corresponding sample (10) by combining the formed outline removal pattern (P) with the image information.