发明名称 DEVICE FOR COATING SUBSTRATE
摘要 PROBLEM TO BE SOLVED: To provide a device for coating an alkali metal and an alkaline earth metal having high reactivity respectively.SOLUTION: A coating device has a steam supply system 1 in which a steam distributor 3 is connected to an evaporator crucible 7 through an inlet 5, and at least one valve 13 is arranged between the crucible 7 and the inlet 5, and further, the evaporator crucible 7 is constituted of a material which is inactive to a highly reactive material positioned in a chamber 12 capable of exhausting therefrom or injecting therein by a vacuum valve 11.
申请公布号 JP2014169501(A) 申请公布日期 2014.09.18
申请号 JP20140062914 申请日期 2014.03.26
申请人 APPLIED MATERIALS INC 发明人 STEFAN BANGERT;JOSE MANUEL DIEGUEZ-CAMPO;MICHAEL KOENIG;NETY M KRISHNA;BYUNG-SUNG LEO KWAK
分类号 C23C14/24;H01M4/134;H01M4/1395 主分类号 C23C14/24
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