| 摘要 |
PROBLEM TO BE SOLVED: To reinforce an FD(Fault Detection)/FP(Fault Prediction) function targeting process quantity in a device level.SOLUTION: A failure detection system includes: a data acquisition part 1 for acquiring the time-series data of state quantity by using process quantity as targeted state quantity; a representative value storage part 2 for combining the highest value of a state quantity change rate with the state quantity when the state quantity change rate reaches the highest value, and for storing it as a representative value; a change rate calculation part 3 for calculating the state quantity change rate on the basis of the data of the state quantity acquired by the data acquisition part 1; and a representative value updating part 4 for, when the absolute value of the latest state quantity change rate calculated by the change rate calculation part 3 is larger than the absolute value of the highest value of the state quantity change rate stored in the representative value storage part 2, updating the representative value stored in the representative value storage part 2 into the set of the latest state quantity change rate calculated by the change rate calculation part 3 and the latest state quantity acquired by the data acquisition part 1. |
