| 发明名称 |
MODULAR SUBSTRATE HEATER FOR EFFICIENT THERMAL CYCLING |
| 摘要 |
Embodiments described herein relate to an apparatus and method for a substrate heater for a substrate processing chamber. In one embodiment, a substrate support for a substrate processing chamber includes a body having a top plate with a substrate receiving surface, and a movable heater disposed in the body, the heater being movable relative to the top plate. |
| 申请公布号 |
US2014263271(A1) |
申请公布日期 |
2014.09.18 |
| 申请号 |
US201414172754 |
申请日期 |
2014.02.04 |
| 申请人 |
Applied Materials, Inc. |
发明人 |
SHEELAVANT Gangadhar;BADUVAMANDA Cariappa Achappa |
| 分类号 |
H01L21/67 |
主分类号 |
H01L21/67 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A substrate support for a substrate processing chamber, comprising:
a body having a top plate with a substrate receiving surface; and a movable heater disposed in the body, the heater being movable relative to the top plate. |
| 地址 |
Santa Clara CA US |
