PROCESS LOAD LOCK APPARATUS, LIFT ASSEMBLIES, ELECTRONIC DEVICE PROCESSING SYSTEMS, AND METHODS OF PROCESSING SUBSTRATES IN LOAD LOCK LOCATIONS

摘要

A process load lock apparatus is disclosed. The process load lock apparatus includes a load lock chamber adapted to couple between a mainframe section and a factory interface, the load lock chamber including an entry and an exit each having a slit valve, and a load lock process chamber located at a different level than the load lock chamber at the load lock location wherein the load lock process chamber is adapted to carry out a process on a substrate, such as oxide removal or other processes. Systems including the process load lock apparatus and methods of operating the process load lock apparatus are provided. A lift assembly including a containment ring is also disclosed, as are numerous other aspects.

主权项

1. A process load lock apparatus, comprising:
a load lock chamber adapted to be locatable between, coupled to, and accessed from a mainframe section and a factory interface, the load lock chamber including an entry and an exit each having a slit valve, and a load lock process chamber adapted to be locatable between a mainframe and a factory interface, accessed from the mainframe section, and residing at a different level than the load lock chamber wherein the load lock process chamber is adapted to carry out a process on a substrate.