RARE EARTH SILICATE ENVIRONMENTAL BARRIER COATINGS

摘要

A vapor deposition method may include applying a first electron beam to vaporize a portion of a first target material comprising a rare earth oxide, where the first electron beam delivers a first amount of energy. The method also may include applying a second electron beam to vaporize a portion of a second target material comprising silica, where the second electron beam delivers a second amount of energy different from the first amount of energy. In some examples, the second target material is separate from the first target material. Additionally, the portion of the first target material and the portion of the second target material may be deposited substantially simultaneously over a substrate to form a layer over the substrate. A system for practicing vapor deposition methods and articles formed using vapor deposition methods are also described.

主权项

1. A vapor deposition method comprising:
applying a first electron beam to vaporize a portion of a first target material comprising a rare earth oxide, wherein the first electron beam delivers a first amount of energy; applying a second electron beam to vaporize a portion of a second target material comprising silica, wherein the second electron beam delivers a second amount of energy different from the first amount of energy, and wherein the second target material is separate from the first target material; wherein the portion of the first target material and the portion of the second target material are deposited substantially simultaneously over a substrate to form a layer over the substrate.