ROTARY TABLE FOR THE DEPOSITION OF THIN SURFACE FILMS ON SUBSTRATES

摘要

The purpose of the present invention is to provide rotary table (1) for deposition of thin surface layers onto substrate (21). Rotary table (1) is adapted for rotating the substrates (21) on three axes (4, 8, 18) of rotation (ω1, ω2, ω3). Resulting surface modification of the substrate (21) is performed over the entire surface with uniform thickness.