| 摘要 |
PROBLEM TO BE SOLVED: To provide a determination method for a substrate transfer path that, when change in the substrate transfer path is requested, reduces a load to recalculate the substrate transfer path, easily manages force such as centrifugal force applied on a substrate when transferring the substrate, and suppresses interference of the substrate with a substrate inlet and outlet.SOLUTION: In a determination method for a substrate transfer path using a substrate transfer robot, firstly a track of a straight line A passing a start point O is determined, a track of a circular arc A contacting with the straight line A is calculated, and a straight line B that contacts with the circular arc A and passes an end point P2 is calculated. After that, if the end point P2 is changed, a straight line B1 that passes the changed end point P2a and contacts with the circular arc A is re-calculated without changing a radius of the circular arc A. A center of a substrate holding unit holding a substrate is moved on the straight line A, moved on the circular arc A from a contact point P3 between the straight line A and the circular arc A, and then moved on the straight line B from a contact point P4a between the circular arc A and the straight line B1 to reach the end point P2a. |
