发明名称 METHOD OF MAKING INORGANIC OR INORGANIC/ORGANIC HYBRID BARRIER FILMS
摘要 PROBLEM TO BE SOLVED: To provide a method for forming an inorganic or hybrid organic/inorganic barrier layer on a substrate.SOLUTION: A method comprises condensing a vaporized metal alkoxide on a substrate to form a layer atop the substrate, and contacting the condensed metal alkoxide layer with water to cure the layer.
申请公布号 JP2014168959(A) 申请公布日期 2014.09.18
申请号 JP20140092608 申请日期 2014.04.28
申请人 3M INNOVATIVE PROPERTIES CO 发明人 BRIGHT CLARK I;CHRISTOPHER S LYONS
分类号 B32B9/00;C23C14/06;C23C14/20 主分类号 B32B9/00
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