Method to Improve LiCoO2 Morphology in Thin Film Batteries

摘要

A method for improving the lithium cobalt oxide (LiCoO2) film (such as films in thin film batteries) morphology includes using oxygen (O2) and argon (Ar) gases during sputtering deposition of the LiCoO2 film. This may allow for the manufacturing of thicker LiCoO2 films. Such a method may also significantly reduce or eliminate cracking and obvious columnar structures within the resulting LiCoO2 film layer. Sputtering using a mixture of O2 and Ar also may produce a LiCoO2 film layer that requires lower annealing temperatures to reach good utilization and has higher lithium diffusion rates.

主权项

1. A method for creating a lithium cobalt oxide (LiCo02) film layer in a battery core, comprising:
depositing a LiCo02 film layer by sputtering LiCo02 with a sputtering gas, wherein the sputtering gas is a predetermined mixture of oxygen and argon; and annealing the LiCo02 film layer at a predetermined temperature to achieve a resulting LiCo02 film with generally no film cracking.