OPTICAL DEFLECTOR INCLUDING MEANDER-TYPE PIEZOELECTRIC ACTUATORS COUPLED BY CROSSING BARS THEREBETWEEN

摘要

In an optical deflector including a mirror, a fixed frame surrounding the mirror, and first and second piezoelectric actuators of a meander-type provided opposite to each other with respect to the mirror, for rocking the mirror around an axis on a plane of the fixed frame, the first piezoelectric actuator includes a plurality of first piezoelectric cantilevers folded at first folded portions and coupled to the fixed frame, and the second piezoelectric actuator includes a plurality of second piezoelectric cantilevers folded at second folded portions and coupled to the fixed frame. The optical deflector further includes at least one first crossing bar coupled between one of the first folded portions and one of the second folded portions symmetrically located with respect to the mirror.

主权项

1. An optical deflector comprising:
a mirror; a fixed frame surrounding said mirror; and first and second piezoelectric actuators of a meander-type provided opposite to each other with respect to said mirror, for rocking said mirror around a first axis on a plane of said fixed frame, said first piezoelectric actuator including a plurality of first piezoelectric cantilevers folded at first folded portions and coupled to said fixed frame, said second piezoelectric actuator including a plurality of second piezoelectric cantilevers folded at second folded portions and coupled to said fixed frame, said optical deflector further comprising a first crossing bar coupled between one of said first folded portions and one of said second folded portions symmetrically located with respect to said mirror.