MULTIPLE AXIS RATE SENSOR

摘要

A microelectromechanical systems (MEMS) device includes at least two rate sensors (20, 50) suspended above a substrate (30), and configured to oscillate parallel to a surface (40) of the substrate (30). Drive elements (156, 158) in communication with at least one of the rate sensors (20, 50) provide a drive signal (168) exhibiting a drive frequency. One or more coupling spring structures (80, 92, 104, 120) interconnect the rate sensors (20, 50). The coupling spring structures enable oscillation of the rate sensors (20, 50) in a drive direction dictated by the coupling spring structures. The drive direction for the rate sensors (20) is a rotational drive direction (43) associated with a first axis (28), and the drive direction for the rate sensors (50) is a translational drive direction (64) associated with a second axis (24, 26) that is perpendicular to the first axis (28).

主权项

1. A microelectromechanical systems (MEMS) device comprising:
a first rate sensor; a second rate sensor, said first and second rate sensors being configured to oscillate parallel to a planar surface; drive elements in communication with at least one of said first and second rate sensors for providing a drive signal exhibiting a drive frequency; and a first coupling spring structure interconnecting said first and second rate sensors, said first coupling spring structure enabling oscillation of said first and second rate sensors at said drive frequency in a drive direction dictated by said coupling spring structure, wherein said drive direction for said first rate sensor is a first drive direction associated with a first axis and said drive direction for said second rate sensor is a second drive direction associated with a second axis, said second axis being perpendicular to said first axis.