Sensor device and storage device with a sensor device

摘要

The device (10) has a plate-like sensor plate (100) positioned on a base plate (20). The sensor plate includes a locating recess (101) to position the sensor plate within a maximum range of movement defined by shape of the locating recess. The sensor plate includes a connection device (17) to connect the sensor plate to an evaluation device (80), where a cross section of the locating lug is provided such that the locating recess permits local movement of the sensor plate in all directions in a planar extension over entire length within the maximum range of movement on the base plate. An independent claim is also included for a deposition device.