Process and apparatus for cleaning a surface

摘要

A method of cleaning a surface comprising the steps of directing a laser beam to the surface at a predetermined location and capturing for the predetermined location a) data relating to an acoustic response induced by interaction of the laser with the surface, b) data relating to the optical reflectivity of the surface at the predetermined location, and c) data relating to the spectrographic response of a plume generated by interaction of the laser with the surface.