| 摘要 |
<p>It is to realize a substrate processing system which can continuously carry out inversion of a substrate. A substrate processing system according to the present invention includes: first and second returning devices to return a substrate by a plurality of unit returning elements arranged to be spaced apart from each other at an interval; and a substrate inverting device including a pair of maintaining arm groups which is arranged on a rotary shaft in rotational symmetry, has a plurality of maintaining arms passing the interval of the unit returning elements when the arms rotate around the circumference of the rotary shaft, and can be freely lifted by a lifting means. While a plurality of adsorption parts disposed on one maintaining arm of the maintaining arm groups are adsorbed on a substrate to be inverted, after the adsorption parts are adsorbed on the substrate to be inverted, the maintaining arm groups are rotated around the rotary shaft at an angle of 180 degrees, such that the substrate is inverted, and the maintaining arm groups are ascended above a position to send and receive the substrate till inversion is finished after adsorption of the substrate, and after inversion, are descended to the position to send and receive the substrate when adsorption is released.</p> |
