| 摘要 |
Disclosed is a method of dynamic balance for a magnetic levitation molecular pump involving starting a force-unrestrained imbalance vibration control module after actuating the magnetic levitation molecular pump motor (8). If under the control of the force-unrestrained imbalance vibration control module, an unbalance mass on a rotor makes the maximum radial vibration amplitude of the rotor when accelerating not exceed 1/2 of a protective clearance, the force-unrestrained imbalance vibration control module can inhibit the co-frequency vibration of the rotor, meaning that the rotational speed of the rotor can very quickly exceed the critical rotational speed for the rigidity thereof. As a result, at a relatively high speed, an influence coefficient method is used to perform a dynamic balancing operation on the rotor of the magnetic levitation molecular pump. The method of dynamic balancing can directly perform a dynamic balancing operation on the magnetic levitation molecular pump at high speed, the steps are simple and the efficiency is high. |
