Nano-piezoelectric generator and method of manufacturing the same

摘要

A nano-piezoelectric generator (100) includes a first electrode (120) and a second electrode (150), at least one nano-piezoelectric unit (140), formed of a semiconductor piezoelectric material having a nano-structure, disposed between the first (120)and the second electrodes (150), and an interlayer (130), formed of an insulating material, disposed between the first electrode (120) and the at least one nano-piezoelectric unit (140).