METHOD AND APPARATUS OF TUNING A SCANNING PROBE MICROSCOPE
摘要
An apparatus and method of automatically determining an operating frequency of a scanning probe microscope such as an atomic force microscope (AFM) is shown. The operating frequency is not selected based on a peak of the amplitude response of the probe when swept over a range of frequencies; rather, the operating frequency is selected using only peak data corresponding to a TIDPS curve.
申请公布号
EP2776851(A1)
申请公布日期
2014.09.17
申请号
EP20120848207
申请日期
2012.11.12
申请人
BRUKER NANO, INC.;SU, CHANMIN;SILVA, PAUL;HUANG, LIN;PITTENGER, BEDE;HU, SHUIQING
发明人
SU, CHANMIN;SILVA, PAUL;HUANG, LIN;PITTENGER, BEDE;HU, SHUIQING