发明名称 |
A DEVICE FOR MANUFACTURING A FILM USED FOR A SOLAR CELL |
摘要 |
The present invention relates to a film forming device for a solar cell. The film forming device for the solar cell according to one embodiment of the present invention includes a chamber which receives a substrate and includes a body with a hollow part, a heating device which is installed in the hollow part, and an insulation member which surrounds the substrate and the heating device. |
申请公布号 |
KR20140110163(A) |
申请公布日期 |
2014.09.17 |
申请号 |
KR20130022989 |
申请日期 |
2013.03.04 |
申请人 |
SAMSUNG SDI CO., LTD. |
发明人 |
KIM, IN KI;AHN, DONG GI;KIM, BYOUNG DONG;LEE, SEUNG JIN;KISHIMOTO KATSUSHI |
分类号 |
H01L31/18;H01L31/0216;H01L31/042 |
主分类号 |
H01L31/18 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|