发明名称 A DEVICE FOR MANUFACTURING A FILM USED FOR A SOLAR CELL
摘要 The present invention relates to a film forming device for a solar cell. The film forming device for the solar cell according to one embodiment of the present invention includes a chamber which receives a substrate and includes a body with a hollow part, a heating device which is installed in the hollow part, and an insulation member which surrounds the substrate and the heating device.
申请公布号 KR20140110163(A) 申请公布日期 2014.09.17
申请号 KR20130022989 申请日期 2013.03.04
申请人 SAMSUNG SDI CO., LTD. 发明人 KIM, IN KI;AHN, DONG GI;KIM, BYOUNG DONG;LEE, SEUNG JIN;KISHIMOTO KATSUSHI
分类号 H01L31/18;H01L31/0216;H01L31/042 主分类号 H01L31/18
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