| 摘要 |
<p>Polycrystalline silicon pieces having at least one break or cut surface and a metal contamination of 0.07-1 ng/cm 2>, is claimed. An independent claim is included for breaking silicon body, preferably a rod made of polycrystalline silicon, comprising (a) determining a lowest bend frequency of the silicon body, and (b) excitation of the silicon body in its lowest bend frequency by a vibration exciter, where the excitation step takes place at an excitation site of the silicon body in such a way that the silicon body breaks at the excitation site resulting in a surface of fracture having the metal contamination of 0.07-1 ng/cm 2>.</p> |
